Solar

Ultratech a division of Veeco

Atomic Layer Deposition Systems (ALD)

• Savannah
• Fiji
• Phoenix

NANO-MASTER, Inc.

Thin Film Deposition

• E-Beam Evaporation

• PECVD

• Sputtering

• Thermal Evaporation

Etching

• Reactive Ion Etching

• Deep Reactive Ion Etching

• Ion Beam Milling

Thin Film Growth

• PA-MOCVD - Table Top Plasma Assisted Metal Organic Chemical Vapor Deposition (PA-MOCVD)

Wafer Cleaning Systems

Wet Cleaning

• Single Wafer Cleaners (SWC)

• Large Substrate Cleaner (LSC)

• Pelliclized and Unpelliclized Reticle

Dry Cleaning

• Plasma Ashing Systems

Dual Chamber Systems

Space Simulation Systems 

Copper Welding of Solar Thermal Heaters

Laser Scribbing of Thin Films